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High-Temperature In-situ Raman Spectroscopy System
This high-temperature in-situ Raman spectroscopy system performs real-time optical imaging and spectroscopy during high-temperature epitaxial deposition processes.
Its unique optical and structural design couples a Micro-CVD deposition platform with a Raman spectrometer, effectively suppresses high-temperature blackbody radiation interference, and captures high-quality in-situ Raman spectra. The system integrates proprietary CAP software for automated measurement and analysis.
Key capabilities:
- In-situ support: CVD / Raman / PL / SHG
- High-temperature stability evaluation for power device materials
- Spectral characterization and quantum-change validation
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